Product
- Slot-Type Wet Process Eqpt.
Slot-Type Wet Process Eqpt.
- Single-Wafer Wet Process Eqpt.
Single-Wafer Wet Process Eqpt.
- Auxiliary Eqpt.
Auxiliary Eqpt.
- Dryer
Dryer
- Chamfering Machine
Chamfering Machine
Slot-Type Wet Process Eqpt.
Cassette-less washer is a type of cleaning machine used in semi-conductor manufacturing.The core feature of the washing equi-pment is that cassette is removed from the traditional cleaning equip-ment, thus achieving significant improvement in efficien-cy, flexibility and cleanliness.
產品詳情
? The application scenarios are mainly concentrated in semiconductor manufacturing,MEMS.In the semiconduc-tor manufacturing process,it is widely used in the cleaning steps of key processes such as lithography and etching to ensure that the cleanliness of the wafer meets high requirements
? Compact structure, space-saving design for limited factory environment
? Fewer contact points in the wafer cleaning process to achieve high cleanliness and quality of the product
? Suitable for wafer processing of various sizes, different production needs can be meet.
? Advanced control systems and automation functions to achieve precise temperature,time and chemical soluti-on control, consistent and stable cleaning results can be ensured.
| Applicable Process | Wafer Clean,Etch,PR Strip |
| Applicable Size | 4/6/8/12 inch |
| Handing Method | Special tooling,Loadport |
Process Indicators | Surface Particles:≤300pcs/wafer -@0.1-0.2μm Small Particle 表 面顆粒:≤5-10pcs/wafer @0.3μm Particle Metal Residue:≤5E10 atoms/cm2 |
| Software Support | GEM/SECS interface,which provides functions such as EAP,MES etc. |
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