Product
- Slot-Type Wet Process Eqpt.
Slot-Type Wet Process Eqpt.
- Single-Wafer Wet Process Eqpt.
Single-Wafer Wet Process Eqpt.
- Auxiliary Eqpt.
Auxiliary Eqpt.
- Dryer
Dryer
- Chamfering Machine
Chamfering Machine
Auxiliary Eqpt.
產品詳情
? Automatic liquid addition,liquid replenishment and liquid preparation can be realized,the operator only ne-eds to take and place the barrel, which reduces labor intensity and improves work efficiency.
? The required chemical liquid can be provided for wet cleaning equipment accurately and the stable flow of chemical liquid during the cleaning process can be ensured.
? The compact design of the small vertical structure and a small footprint are suitable for wet cleaning works-hop with limited space, which can effectively save space.
| Dimensions | L700*W500*H2000mm |
| Stock-Of-Liquid Barrel | 20L*2 Place up and down |
| Liquid Supply Pumps | PTFE Material |
| Pipe Valves | PFA Material |
| Flow Rate | 20-40L/min |
| Security Features | Low air pressure alarm/Low level alerts/Leak protection |
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