Product
- Slot-Type Wet Process Eqpt.
Slot-Type Wet Process Eqpt.
- Single-Wafer Wet Process Eqpt.
Single-Wafer Wet Process Eqpt.
- Auxiliary Eqpt.
Auxiliary Eqpt.
- Dryer
Dryer
- Chamfering Machine
Chamfering Machine
Auxiliary Eqpt.
CDS Liquid Supply System is a highly automated chemical supp-ly system,which is mainly used to supply various chemical liquids to the production line 24 hours a day. The system is widely used in the automatic supply of chemical liquids for wet equipment in integrated circuits, semiconductor material processing, LED, solar photovoltaics, MEMS and other industries. The CDS liquid supply system can realize the automatic dosing, replenishment and dis-pensing of chemical liquids, ensuring the accurate proportioning and stable supply of chemical solutions in the production proce-ss, and is the core support system of many processes.
產品詳情
? Equipped with high-precision metering devices, it helps to improve the stability of product quality.
? The advanced control system can ensure the chemical liquid output is at a stable flow rate.
? The modular design concept reduces maintenance time and costs.
? The online monitoring and fault diagnosis functions can help maintenance personnel quickly locate and solve problems.
? Leak-proof design can prevent safety incidents.
? Remote monitoring of the operation improve the convenience and safety.
? The automatic dispensing function improves the accuracy and efficiency of dispensing.
? Compatible with a variety of chemical liquids to meet the needs of different production processes for a variety of chemical liquids.
? The system with excellent scalability can adapt to future development needs.
| Dimensions | L2500*W1500*H2000mm |
| Stock-Of-Liquid Barrel | 200L*2Left and Right Placement |
| Liquid Supply Pumps | PTFE Material |
| Pipe Valves | PFA Material |
| Flow Rate | 30-60L/min |
| Security Features | Low air pressure alarm/Low level alerts/Leak protection |
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