Product
- Slot-Type Wet Process Eqpt.
Slot-Type Wet Process Eqpt.
- Single-Wafer Wet Process Eqpt.
Single-Wafer Wet Process Eqpt.
- Auxiliary Eqpt.
Auxiliary Eqpt.
- Dryer
Dryer
- Chamfering Machine
Chamfering Machine
Auxiliary Eqpt.
產品詳情
? Excellent cleaning effect: all-round cleaning without dead angles, and the special cleaning process and no-zzle design are used to make the cleaning liquid is evenly sprayed to all parts of the inside of the quartz bell jar.
? High-precision cleaning: High precision can be achieved for the microscopic particles and impurities that may be generated during epitaxial growth cleaning.
? Avoiding stress damage: There will be no excessive mechanical or thermal stress on the quartz bell during the cleaning process, preventing cracked or deformed bell jars due to stress concentrations.
? High degree of automation: intelligent operation process, equipped with advanced automatic controlling system, fully-auto cleaning process.
? Strong compatibility and versatility:different sizes are compatible,and epitaxial stones can be designed to adapt to different sizes and specifications of bell jar cleaning to meet a variety of production needs.
? Customized cleaning process: the cleaning scheme can be flexibly customized according to different clea-ning needs and process requirements.
| Tank Material | PVDF/NPP |
| Applicable Size | 50/100/200/300/400/600mm |
| Handing Method | Special Tooling |
| Bearing Method | Manual/Robot |
| Slot Arrangement | Front and rear double slots/left and right multiple slots |
| Drying Method | N2 purge |
企業郵箱:sales@cgbtek.com
企業網站
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