Product
- Slot-Type Wet Process Eqpt.
Slot-Type Wet Process Eqpt.
- Single-Wafer Wet Process Eqpt.
Single-Wafer Wet Process Eqpt.
- Auxiliary Eqpt.
Auxiliary Eqpt.
- Dryer
Dryer
- Chamfering Machine
Chamfering Machine
Single-Wafer Wet Process Eqpt.
產品詳情
? Compatible with a wide range of wafer specs
? Self-cleaning brush head
? Optional configure(wet in and dry out or dry in and out)
? Independent flipping module, automatic flipping and cleaning of both sides of the wafer
? Flexible chambers( 2/4/6/8 )configuring
? Excellent cleaning results
? A variety of safety tests(avoiding Debris producing)
| Applicable Process | Wafer Clean,Mask Clean |
| Applicable Size | 4&6 inch,6&8 inch,8&12 inch |
| Loadport type | Open Cassette,FOUP,SMIF |
| Chemicals | DIW |
| Particle | ≤10ea @0.3μm , ≤500ea @0.2μm |
| Frangementation Rate | ≤0.1‰ |
企業郵箱:sales@cgbtek.com
企業網站
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