Product
- Slot-Type Wet Process Eqpt.
Slot-Type Wet Process Eqpt.
- Single-Wafer Wet Process Eqpt.
Single-Wafer Wet Process Eqpt.
- Auxiliary Eqpt.
Auxiliary Eqpt.
- Dryer
Dryer
- Chamfering Machine
Chamfering Machine
Dryer
The ultra-thin Marangoni drying system is designed for ultra-thin wafers (110μm-1400μm) made of materials such as Silicon (Si), Silicon Carbide (SiC), Gallium Nitride (GaN), and Indium Phosphide (InP). It is compatible with 4/6/8/12-inch wafer sizes and is suitable for advanced packaging, MEMS sensors, and other fields that require stringent control over wafer thickness and surface integrity. Leveraging the high-precision Marangoni effect, the system uses nitrogen pressure to form a nanoscale uniform film of IPA on the water surface. It combines ultra-low stress lifting and micro-pulse drainage dual-mode drying to eliminate the risk of deformation in ultra-thin wafers. The equipment employs a contact-based top and bottom transfer mechanism to ensure zero damage during the handling and drying processes, while also preventing contamination caused by the separation of wafers from their cassettes.
產(chǎn)品詳情
| Model | CGB-MD150-C | CGB-MD200-C | CGB-MD200-P | CGB-MD300-C | CGB-MD300-P |
| Wafer Specifi cation | 6inch （with cassette） | 8inch （with cassette） | 8inch （no cassette） | 12inch （with cassette） | 12inch （no cassette） |
| Chemical Circu lation | pneumatic diaphragm type | ||||
| Drainage | electromagnetic type | ||||
| Liquid Filter | PFA integrated | ||||
| Gas Filter | SUS integrated | ||||
| N? Heater | Independent temperature controller | ||||
| Liquid Level Detection | N? micro-pressure level | ||||
Temperature Management | Temperature sensor; platinum RTD | ||||
Post-Processing Liquid Residue | No | ||||
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